Rankings
Publications
Sources
Publishers
Scholars
Organizations
About
Login
Register
Home
Publications
Orientation Dependence of Si
1-x
C
x
:P Growth and the Impact on FinFET Structures
Home
Publications
Orientation Dependence of Si
1-x
C
x
:P Growth and the Impact on FinFET Structures
Orientation Dependence of Si
1-x
C
x
:P Growth and the Impact on FinFET Structures
JT
John Tolle
John Tolle
KW
K. Doran Weeks
K. Doran Weeks
MB
Matthias Bauer
Matthias Bauer
VM
Vladimir Machkaoutsan
Vladimir Machkaoutsan
JM
Jan Willem Maes
Jan Willem Maes
MT
Mitsuhiro Togo
Mitsuhiro Togo
SB
Stephan Brus
Stephan Brus
AH
Andriy Hikavyy
Andriy Hikavyy
RL
Roger Loo
Roger Loo
Publisher Website
Google Scholar
Cite
Download
Share
Download
15 March 2013
journal article
Published by
The Electrochemical Society
in
ECS Transactions
Vol. 50
(9)
,
491-497
https://doi.org/10.1149/05009.0491ecst
Abstract
No abstract available
Keywords
STRUCTURES
SI1 XCX
MULTIPLE CRYSTALLOGRAPHIC
FINFET DEVICES
CRYSTALLOGRAPHIC ORIENTATIONS
DEPENDENCE OF SI1
Cited by 4 articles