The measurement and uncertainty of a calibration standard for the scanning electron microscope
Open Access
- 9 July 2012
- journal article
- Published by National Institute of Standards and Technology (NIST) in Journal of Research of the National Institute of Standards and Technology
- Vol. 99 (2), 191-199
- https://doi.org/10.6028/jres.099.015
Abstract
Standard Reference Material 484 is an artifact for calibrating the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000 × to 20000 ×. Seven issues, SRM-484, and SRM-484a to SRM-484f, have been certified between 1977 and 1992. This publication documents the instrumentation, measurement procedures and determination of uncertainty for SRM-484 and illustrates with data from issues 484e and 484f.Keywords
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