Si-cap-free SiGe p-channel FinFETs and gate-all-around transistors in a replacement metal gate process: Interface trap density reduction and performance improvement by high-pressure deuterium anneal
- 1 June 2015
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. T142-T143
- https://doi.org/10.1109/vlsit.2015.7223654
Abstract
We demonstrate Si-cap-free SiGe p-channel FinFETs and gate-all-around (GAA) FETs in a replacement metal gate (RMG) process, for Ge contents of 25% and 45%. We show that the performance of these devices is substantially improved by high-pressure (HP) deuterium (D2) anneal, which is ascribed to a 2x reduction in interface trap density (DIT). Furthermore, it is found that (1) TMAH treatment of SiGe prior to HK deposition and (2) HK post-deposition annealing (PDA) are beneficial for DIT reduction as well, and that NBTI reliability is improved by both HP D2 anneal and TMAH treatment.Keywords
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