The effect of thermal treatment on the structure, optical and electrical properties of amorphous titanium nitride thin films
- 31 December 1997
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 311 (1-2), 93-100
- https://doi.org/10.1016/s0040-6090(97)00714-1
Abstract
No abstract availableKeywords
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