Nanoelectromechanical contact switches
Top Cited Papers
- 29 April 2012
- journal article
- Published by Springer Science and Business Media LLC in Nature Nanotechnology
- Vol. 7 (5), 283-295
- https://doi.org/10.1038/nnano.2012.40
Abstract
Nanoelectromechanical (NEM) switches have the potential to complement or selectively replace conventional semiconductor technology. This Review discusses the challenges involved in the large-scale manufacture of a representative set of NEMS-based devices.Keywords
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