Wafer-level fabrication process for fully encapsulated micro-supercapacitors with high specific energy
- 8 January 2012
- journal article
- Published by Springer Science and Business Media LLC in Microsystem Technologies
- Vol. 18 (4), 467-473
- https://doi.org/10.1007/s00542-011-1415-7
Abstract
No abstract availableKeywords
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