A study of electrical properties and microstructure of nitrogen-doped poly-SiC films deposited by LPCVD
- 16 May 2007
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 136 (2), 613-617
- https://doi.org/10.1016/j.sna.2006.12.024
Abstract
No abstract availableKeywords
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