Nanoindentation hardness, abrasive wear, and microstructure of TiN/NbN polycrystalline nanostructured multilayer films grown by reactive magnetron sputtering
- 1 September 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 16 (5), 3104-3113
- https://doi.org/10.1116/1.581466
Abstract
No abstract availableThis publication has 34 references indexed in Scilit:
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