Optical characterization of 9x9 optical cross connect utilizing silicon lens scanners with spider-leg actuators
- 21 January 2006
- conference paper
- conference paper
- Published by SPIE-Intl Soc Optical Eng in MOEMS Display, Imaging, and Miniaturized Microsystems IV
- Vol. 6114, 61140E
- https://doi.org/10.1117/12.645631