Origami fabrication of nanostructured, three-dimensional devices: Electrochemical capacitors with carbon electrodes

Abstract

The Nanostructured Origami™ 3-D Fabrication and As- sembly Process, inspired by the paper folding art of origami, is a two-step fabrication approach that combines established microfabrication tools with state-of-the-art nanofabrication techniques to create 3-D devices with nanostructured mate- rials. In the first step of the process, standard planar fabrica- tion tools and techniques are used to create a micro- and nanopatterned 2-D membrane. The membrane can be thought of as the analog of "paper" used in conventional origami and, in addition to being patterned directly, can provide a base on which to grow or deposit nanostructured materials. During this stage, the membrane is also patterned with features that will allow it to fold, such as creases, hinges, and various actuation mechanisms. In the second step of the origami pro- cess, the membrane is automatically folded into the desired 3-D configuration. Automatic folding, an important feature of the origami process that enables batch fabrication, has been accomplished previously through either Lorentz force or strain-induced actuation methods.1 Membrane folding of