Modeling Piezoresistive Microcantilever Sensor Response to Surface Stress for Biochemical Sensors
- 16 July 2008
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Sensors Journal
- Vol. 8 (8), 1404-1410
- https://doi.org/10.1109/jsen.2008.920706
Abstract
This paper considers mechanical stress and strain in a piezoresistive cantilever sensor under surface stress loading, which is the loading condition that occurs in biochemical sensing applications. Finite element simulations examine the piezoresistor sensitivity due to changes in cantilever length, width, and thickness, and piezoresistor size, location, and depth. A few unexpected results are found. Unlike cantilevers designed for atomic force microscopy, cantilevers for biochemical sensing should be short and wide. While shallow piezoresistors offer good sensitivity, the piezoresistor may extend far into the thickness of the cantilever and still be quite effective. The paper concludes with comments on design guidelines for piezoresistive cantilever sensors.Keywords
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