High-mode resonant piezoresistive cantilever sensors for tens-femtogram resoluble mass sensing in air
- 7 April 2006
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 16 (5), 1017-1023
- https://doi.org/10.1088/0960-1317/16/5/019
Abstract
No abstract availableThis publication has 28 references indexed in Scilit:
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