Effects of nitrogen addition on methane-based ECR plasma etching of gallium nitride
- 1 May 2002
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 190 (1-4), 361-365
- https://doi.org/10.1016/s0169-4332(01)00853-4
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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