Low-pressure-encapsulated resonant structures with integrated electrodes for electrostatic excitation and capacitive detection
- 1 April 1998
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 66 (1-3), 160-166
- https://doi.org/10.1016/s0924-4247(98)80019-8
Abstract
No abstract availableKeywords
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