Study of the Transverse Piezoelectric Coefficient of Pb(Zr,Ti)O3 Thin Films as a Function of Texture and Composition
- 1 January 1999
- journal article
- Published by Springer Science and Business Media LLC in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin filmsSensors and Actuators A: Physical, 1999
- The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin filmsSensors and Actuators A: Physical, 1998
- Measurement of piezoelectric strength of ZnO thin films for MEMS applicationsSmart Materials and Structures, 1998
- Which PZT thin films for piezoelectric microactuator applications?Integrated Ferroelectrics, 1998
- Piezoelectric thin films for memsIntegrated Ferroelectrics, 1997
- Crystal Orientation Dependence of Piezoelectric Properties in Lead Zirconate Titanate: Theoretical Expectation for Thin FilmsJapanese Journal of Applied Physics, 1997
- Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditionsSensors and Actuators A: Physical, 1996
- Measurement of Piezoelectric Constant of ZnO Thin Film on Si MicrostructureJapanese Journal of Applied Physics, 1995
- Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensors applicationsSensors and Actuators A: Physical, 1992
- Preparation and Property of Polytellurophene and PolyselenopheneJapanese Journal of Applied Physics, 1985