Manufacture and performance of the thermal-bonding Micromegas prototype

Abstract
The micro-mesh gaseous structure (Micromegas) has been significantly developed since it was proposed in 1995 at Saclay (France). Some new construction methods different from ``bulk'' etching technique are under R&D. Here we report the results of several prototypes manufactured with thermal-bonding method, The details of this method and the performances of the chambers are presented. For a 200 × 200 m 2 prototype, the energy resolution of 16% (FWHM) for 5.9 keV x-rays is achieved at a gain of 2000–4000. In addition, the sparking-resistant chammber with a Gemanium anode is under studying.

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