Electron beam charging of insulators with surface layer and leakage currents
- 15 March 2008
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 103 (6)
- https://doi.org/10.1063/1.2890427
Abstract
International audienceThe electron beam induced selfconsistent charge transport in layered insulators is described by means of an electron-hole fight-drift model FDM and an iterative computer simulation. Ballistic secondary electrons and holes, their attenuation and drift, as well as their recombination, trapping, and detrapping are included. Thermal and field-enhanced detrapping are described by the Poole-Frenkel effect. Furthermore, an additional surface layer with a modified electric surface conductivity is included which describes the surface leakage currents and will lead to particular charge incorporation at the interface between the surface layer and the bulk substrateKeywords
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