Deposition parameter effects on the composition and the crystalline state of reactively sputtered molybdenum nitride
- 1 April 1992
- journal article
- Published by Elsevier BV in Surface and Coatings Technology
- Vol. 52 (2), 179-185
- https://doi.org/10.1016/0257-8972(92)90044-b
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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