Atomic Layer Deposition of SrTiO3 Thin Films with Highly Enhanced Growth Rate for Ultrahigh Density Capacitors
- 30 March 2011
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 23 (8), 2227-2236
- https://doi.org/10.1021/cm2002572
Abstract
No abstract availableKeywords
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