Massively-parallel ultra-high-aspect-ratio nanochannels as mesoporous membranes
- 19 November 2008
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in Lab on a Chip
- Vol. 9 (4), 586-591
- https://doi.org/10.1039/b809370a
Abstract
Many fabrication technologies have been used to build nano/mesoporous materials/filters with a good size control, but the integration of these systems into a microsystem format has been a challenge. Microfabricated nanofilters suffer from small open volume and low-throughput. In this paper, we developed a novel fabrication strategy for generating massively-parallel, regular vertical nanochannel membranes with a uniform, well-controlled gap size of ∼50 nm and a depth up to ∼40 µm, by using only standard semiconductor fabrication techniques. The vertical nanofilter membranes were fabricated into an anisotropic nanofilter array, which demonstrates the ability to integrate nanofilters and micron-sized channels/pores seamlessly. We demonstrated efficient continuous-flow separation of large DNAs and small molecules in a two-dimensional vertical nanochannel array device. These ultra-high-aspect-ratio nanochannels have the advantage of large open volume, enabling high-throughput applications.Keywords
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