Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser
- 1 February 2005
- journal article
- research article
- Published by Springer Science and Business Media LLC in Applied Physics A
- Vol. 80 (3), 461-465
- https://doi.org/10.1007/s00339-004-3093-0
Abstract
We report direct laser writing of lithography patterns with a feature width of 20±5 nm on thin photoresist film by combining a double-frequency femtosecond laser and a near-field scanning optical microscope. The obtained feature size is much smaller than the laser wavelength (λ) and the aperture diameter (d) with a resolution of λ/20 and d/2, respectively. The lithography patterns were analyzed with an atomic force microscope and a scanning electron microscope. The effects of laser energy and writing speed on the feature size were investigated. The underlying physical mechanism was also discussed.Keywords
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