MEMS for Plasmon Control of Optical Metamaterials
Open Access
- 21 January 2015
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Selected Topics in Quantum Electronics
- Vol. 21 (4), 137-146
- https://doi.org/10.1109/jstqe.2014.2385957
Abstract
Metamaterials have attracted a great deal of attention as artificial electromagnetic materials having unique optical characteristics, and various innovative optical applications have been expected. Micro electromechanical systems (MEMS)-based reconfigurable metamaterials are candidate technologies for active optical control. In this paper, we focus on MEMS-based reconfigurable metamaterials operated in the optical region between visible and near-infrared wavelengths. A brief overview of static optical metamaterials and active optical metamaterials driven by MEMS actuators is presented. Moreover, points to be considered for a micromachining process of optical metamaterials are discussed with results of calculations.Keywords
Funding Information
- MEXT KAKENHI (25109702)
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