Nanometer scale lithography on silicon, titanium and PMMA resist using scanning probe microscopy
- 9 June 1999
- journal article
- Published by Elsevier BV in Solid-State Electronics
- Vol. 43 (6), 1085-1089
- https://doi.org/10.1016/s0038-1101(99)00029-5
Abstract
No abstract availableKeywords
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