Model-based signal conditioning for high-speed atomic force and friction force microscopy
- 30 June 2003
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 67-68 (1), 938-944
- https://doi.org/10.1016/s0167-9317(03)00157-6
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Latex bead projection nanopatternsSurface and Interface Analysis, 2002
- Fast closed loop control of piezoelectric transducersJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- High performance feedback for fast scanning atomic force microscopesReview of Scientific Instruments, 2001
- Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy ApplicationJournal of Dynamic Systems, Measurement, and Control, 1999
- N4SID: Subspace algorithms for the identification of combined deterministic-stochastic systemsAutomatica, 1994
- Atomic Force MicroscopyPhysics Today, 1990
- Atomic force microscopy for the study of tribology and adhesionThin Solid Films, 1989
- Single-tube three-dimensional scanner for scanning tunneling microscopyReview of Scientific Instruments, 1986