Electron beam testing techniques
- 31 March 1992
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 16 (1-4), 3-14
- https://doi.org/10.1016/0167-9317(92)90319-m
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- A charge compensation method for measuring passivated devices with high extraction voltageMicroelectronic Engineering, 1992
- The capacitive coupling error and the capacitive coupling cross talk in electron beam testing of passivated IC and measures for their reductionMicroelectronic Engineering, 1990
- A high frequency logic-state tracing methodMicroelectronic Engineering, 1986
- In-the-lens secondary electron analyser for IC internal voltage measurements with electron beamsElectronics Letters, 1984