Synthesis, Processing, and Manufacturing of Components, Devices, and Systems
- 19 April 2011
- book chapter
- Published by Springer Science and Business Media LLC
Abstract
No abstract availableThis publication has 95 references indexed in Scilit:
- Molecular printing.Nature Chemistry, 2009
- An Efficient Route to Mesoporous Silica Films with Perpendicular NanochannelsAdvanced Materials, 2007
- Polymer self assembly in semiconductor microelectronicsIBM Journal of Research and Development, 2007
- Erratum: Nanoparticle-tuned assembly and disassembly of mesostructured silica hybridNature Materials, 2007
- Nanoparticle-tuned assembly and disassembly of mesostructured silica hybridsNature Materials, 2007
- Mesoporous Silicates Prepared Using Preorganized Templates in Supercritical FluidsScience, 2004
- Process integration of self-assembled polymer templates into silicon nanofabricationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- Integration of self-assembled diblock copolymers for semiconductor capacitor fabricationApplied Physics Letters, 2001
- Block Copolymer Lithography: Periodic Arrays of ~10 11 Holes in 1 Square CentimeterScience, 1997
- Block Copolymer Thermodynamics: Theory and ExperimentAnnual Review of Physical Chemistry, 1990