Effects of ion bombardment on properties of d.c. sputtered superhard (Ti, Si, Al)N nanocomposite coatings
- 1 March 2002
- journal article
- Published by Elsevier BV in Surface and Coatings Technology
- Vol. 151-152, 515-520
- https://doi.org/10.1016/s0257-8972(01)01578-x
Abstract
No abstract availableKeywords
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