Mechanical light modulator fabricated on a silicon chip using SIMOX technology
- 1 May 1994
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 43 (1-3), 170-174
- https://doi.org/10.1016/0924-4247(93)00688-z
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- ‘SIMOX’ (Separation by Ion Implantation of Oxygen): a Technology for high-temperature silicon sensorsSensors and Actuators A: Physical, 1990
- Formation of etch-stop structures utilizing ion-beam synthesized buried oxide and nitride layers in siliconSensors and Actuators, 1989
- Analysis of an interferometric optical fibre detection technique applied to silicon vibrating sensorsElectronics Letters, 1987