Electrode-induced degradation of Pb(ZrxTi1−x)O3 (PZT) polarization hysteresis characteristics in Pt/PZT/Pt ferroelectric thin-film capacitors

Abstract

One of the most serious forms of damage that occurs during the integration of Pt/PZT/Pt ferroelectric capacitors [where PZT is Pb(ZrxTi1−x)O3] is the disappearance of polarization hysteresis characteristics during the passivation process. The hydrogen content of the atmosphere during this process affects the ferroelectric capacitor characteristics. However, the PZT film itself is not damaged by annealing in a hydrogen-containing atmosphere even at 400 °C, whereas the Pt/PZT/Pt ferroelectric capacitor loses its polarization hysteresis characteristics at 300 °C. The top Pt electrode was found to induce this damage. Possible mechanisms such as stress and a chemical reaction with the Pt catalyst are discussed.