Micro-electrodischarge machining is used to machine small features such as holes, cavities and slots with high aspect ratios in electrically-conductive materials for various applications including medical implants, printing devices, dies and spray nozzles. In this study, the positional accuracy of a micro-EDM machine was assessed while simulating the machining of an array of holes. The measurement involved the use of a diffraction grid plate and non-contact scanning head. This enabled various conclusions to be drawn as to the relative deviations experienced when machining small features such as (phi) 50 micrometers holes.