Rankings
Publications
Sources
Publishers
Scholars
Organizations
About
Login
Register
Home
Publications
Growth and characterization of cubic boron nitride thin films
Home
Publications
Growth and characterization of cubic boron nitride thin films
Growth and characterization of cubic boron nitride thin films
DK
D. J. Kester
D. J. Kester
KA
K. S. Ailey
K. S. Ailey
DL
D. J. Lichtenwalner
D. J. Lichtenwalner
R. F. Davis
R. F. Davis
Publisher Website
Google Scholar
Cite
Download
Share
Download
1 November 1994
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 12
(6)
,
3074-3081
https://doi.org/10.1116/1.578938
Abstract
No abstract available
Keywords
NITRIDES
ELECTRON BEAM
CRYSTAL STRUCTURE
DIMENSIONS
THIN FILM
ION BEAM
THIN FILMS
FOURIER TRANSFORM INFRARED SPECTROSCOPY
NITROGEN
MATERIALS SCIENCE
DEPOSITION
BEAMS
HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY
SINGLE CRYSTAL
CRYSTAL LATTICES
NUCLEATION
FILMS
Cited by 126 articles