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Langmuir probe measurements of a radio frequency induction plasma
Home
Publications
Langmuir probe measurements of a radio frequency induction plasma
Langmuir probe measurements of a radio frequency induction plasma
J. Hopwood
J. Hopwood
CG
C. R. Guarnieri
C. R. Guarnieri
SW
S. J. Whitehair
S. J. Whitehair
JC
J. J. Cuomo
J. J. Cuomo
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1 January 1993
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 11
(1)
,
152-156
https://doi.org/10.1116/1.578282
Abstract
No abstract available
Keywords
RADIO FREQUENCY
Cited by 262 articles