Forging of metallic nano-objects for the fabrication of submicron-size components
- 21 February 2007
- journal article
- research article
- Published by IOP Publishing in Nanotechnology
- Vol. 18 (12)
- https://doi.org/10.1088/0957-4484/18/12/125303
Abstract
In recent years, nanoscale fabrication has developed considerably, but the fabrication of free-standing nanosize components is still a great challenge. The fabrication of metallic nanocomponents utilizing three basic steps is demonstrated here. First, metallic alloys are used as factories to produce a metallic raw stock of nano-objects/nanoparticles in large numbers. These objects are then isolated from the powder containing thousands of such objects inside a scanning electron microscope using manipulators, and placed on a micro-anvil or a die. Finally, the shape of the individual nano-object is changed by nanoforging using a microhammer. In this way free-standing, high-strength, metallic nano-objects may be shaped into components with dimensions in the 100 nm range. By assembling such nanocomponents, high-performance microsystems can be fabricated, which are truly in the micrometre scale (the size ratio of a system to its component is typically 10:1).Keywords
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