Characterization of silicon oxynitride gas barrier films
- 1 October 2002
- journal article
- Published by Elsevier BV in Vacuum
- Vol. 68 (2), 113-117
- https://doi.org/10.1016/s0042-207x(02)00294-4
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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