Force characteristic analysis of a magnetic gravity compensator with annular magnet array for magnetic levitation positioning system
Open Access
- 13 December 2017
- journal article
- research article
- Published by AIP Publishing in AIP Advances
- Vol. 8 (5)
- https://doi.org/10.1063/1.5005964
Abstract
Magnetic levitation positioning system (MLPS) is considered to be the state of the art in inspection and manufacturing systems in vacuum. In this paper, a magnetic gravity compensator with annular magnet array (AMA-MGC) for MLPS is proposed. Benefiting from the double-layer annular Halbach magnet array on the stator, the proposed AMA-MGC possesses the advantages of symmetrical force, high force density and small force fluctuation. Firstly, the basic structure and operation principle of the AMA-MGC are introduced. Secondly, the basic characteristics of the AMA-MGC such as magnetic field distribution, levitation force, parasitic force and parasitic torque are analyzed by the three-dimensional finite element analysis (3-D FEA). Thirdly, the influence of structural parameters on force density and force fluctuation is investigated, which is conductive to the design and optimization of the AMA-MGC. Finally, a prototype of the AMA-MGC is constructed, and the experiment shows good agreement with the 3-D FEA results.Keywords
Funding Information
- Fundamental Research Funds for the Central Universities (HIT.NSRIF.2017011)
- National Natural Science Foundation of China (51507034)
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