A novel silicon accelerometer with a surrounding mass structure
- 1 February 1990
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 21 (1-3), 308-311
- https://doi.org/10.1016/0924-4247(90)85061-8
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Design optimization for cantilever-type accelerometersSensors and Actuators, 1984
- A batch-fabricated silicon accelerometerIEEE Transactions on Electron Devices, 1979