Electrically coupled MEMS bandpass filters: Part I: With coupling element
- 26 August 2005
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 122 (2), 307-316
- https://doi.org/10.1016/j.sna.2005.03.038
Abstract
No abstract availableKeywords
Funding Information
- Defense Advanced Research Projects Agency (01-01-1-R004)
- Georgia Institute of Technology
- National Science Foundation
This publication has 1 reference indexed in Scilit:
- Coupled micromechanical drumhead resonators with practical application as electromechanical bandpass filtersJournal of Micromechanics and Microengineering, 2002