A silicon micromechanical galvanometric scanner
- 30 March 1999
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 73 (3), 252-260
- https://doi.org/10.1016/s0924-4247(98)00288-x
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
- Silicon-micromachined scanning confocal optical microscopeJournal of Microelectromechanical Systems, 1998
- Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioningJournal of Microelectromechanical Systems, 1998
- Active microlevers as miniature torque magnetometersJournal of Applied Physics, 1996
- Magnetic microactuation of torsional polysilicon structuresSensors and Actuators A: Physical, 1996
- Magnetically driven microstructures fabricated with multilayer electroplatingSensors and Actuators A: Physical, 1995
- Electrostatically deflectable polysilicon torsional mirrorsSensors and Actuators A: Physical, 1994
- Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminumSensors and Actuators A: Physical, 1994
- A silicon light modulatorJournal of Physics E: Scientific Instruments, 1988
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Silicon Torsional Scanning MirrorIBM Journal of Research and Development, 1980