Rear surface spallation on single-crystal silicon in nanosecond laser micromachining
- 2 May 2005
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 97 (10), 104304
- https://doi.org/10.1063/1.1896095
Abstract
Rear surface spallation of single-crystal silicon under laser pulse ablation at intensities of is studied through postablation examination of the ablated samples. The spallation threshold energy and the spallation depth’s dependences on the energy and target thickness are measured. From the linear relation between the spallation threshold energy and the target thickness, an estimation of the material spall strength around is obtained, in reasonable agreement with the spall strength estimation of at a strain rate of using Grady’s model for brittle materials. The experiment reveals the internal fracturing process over an extended zone in silicon, which is controlled by the competition between the shock pressure load and the laser ablation rate. The qualities of the laser microstructuring and micromachining results are greatly improved by using an acoustic impedance matching approach.
Keywords
This publication has 19 references indexed in Scilit:
- Laser-induced plasmas in micromachined fused silica cavitiesApplied Physics Letters, 2003
- Fracture toughness and crack growth phenomena of plasma-etched single crystal siliconSensors and Actuators A: Physical, 2000
- Precision micromachining with pulsed green lasersJournal of Laser Applications, 1998
- Simulation of spall fracture of aluminum and magnesium over a wide range of load duration and temperatureInternational Journal of Impact Engineering, 1997
- Spallation of metals under laser irradiationJournal of Applied Physics, 1991
- Experimental and numerical study of laser induced spallation into aluminum and copper targetsJournal of Applied Physics, 1991
- Laser-induced spall in metals: Experiment and simulationJournal of Applied Physics, 1990
- The spall strength of condensed matterJournal of the Mechanics and Physics of Solids, 1988
- Spallation as an effect of laser-induced shock wavesJournal of Materials Science, 1988
- A criterion for the time dependence of dynamic fractureInternational Journal of Fracture, 1968