On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems
- 1 November 2010
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 28 (6), C6O1-C6O7
- https://doi.org/10.1116/1.3511508
Abstract
In this article, the authors present and discuss the fabrication of three-dimensional (3D) optical phased array (OPA) devices for large angle, two-dimensional optical beam steering. Fabrication of a single layer (one-dimensional) OPA prototype for one-dimensional beam steering on silicon nanomembrane is presented. The authors present different approaches, such as nanoimprint lithography, optical lithography, and self-aligned patterning of multibonded silicon-on-insulator wafers, for the realization of 3D OPA devices in particular and 3D photonic circuits in general. At the end, the authors discuss the challenges and potential solutions.Keywords
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