Nanoindentation of ZrN Coatings on Silicon and Copper Substrates
- 1 September 2018
- journal article
- Published by Allerton Press in Russian Engineering Research
- Vol. 38 (9), 735-737
- https://doi.org/10.3103/s1068798x18090289
Abstract
An effective mathematical model is proposed to describe experiments on the indentation of samples with layered or functionally graded coatings. The model is based on the elastic contact problem corresponding to the penetration of a punch in a coated elastic half-space. A Berkovich indenter is considered. The results of the simulation and the experiments are compared for the indentation of two zirconium nitride (ZrN) coatings on substrates of monocrystalline (100) silicon and annealed copper. The agreement of the results is good.Keywords
This publication has 6 references indexed in Scilit:
- Indentation of a hard transversely isotropic functionally graded coating by a conical indenterInternational Journal of Engineering Science, 2017
- The axisymmetric contact problem of the indentation of a conical punch into a half-space with a coating inhomogeneous in depthJournal of Applied Mathematics and Mechanics, 2015
- Simulations in NanobiotechnologyPublished by Taylor & Francis Ltd ,2011
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992
- A study of the picostructure of sputtered ZrN filmsSurface and Coatings Technology, 1991
- Handbook of the Physicochemical Properties of the ElementsPublished by Springer Science and Business Media LLC ,1968