A study of microstructure and nanomechanical properties of silicon incorporated DLC films deposited on silicon substrates
- 1 March 2001
- journal article
- Published by Elsevier BV in Diamond and Related Materials
- Vol. 10 (3-7), 1070-1075
- https://doi.org/10.1016/s0925-9635(00)00544-6
Abstract
No abstract availableKeywords
This publication has 28 references indexed in Scilit:
- The effects of Si incorporation on the microstructure and nanomechanical properties of DLC thin filmsJournal of Physics: Condensed Matter, 2000
- A critical examination of the fundamental relations used in the analysis of nanoindentation dataJournal of Materials Research, 1999
- Finite-element modeling of nanoindentationJournal of Applied Physics, 1999
- Photoluminescence and Raman spectroscopy in hydrogenated carbon filmsIEEE Transactions on Magnetics, 1997
- Determining hybridization differences for amorphous carbon from the XPS C 1s envelopeApplied Surface Science, 1995
- The thermal stability of diamond-like carbonDiamond and Related Materials, 1995
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992
- Characterization of metal-containing amorphous hydrogenated carbon filmsJournal of Materials Research, 1992
- Micro-Tribological Studies on Fluorinated Carbon FilmsJournal of Tribology, 1991
- Optical and mechanical properties of dc sputtered carbon filmsJournal of Materials Research, 1990