Evidence for phase-explosion and generation of large particles during high power nanosecond laser ablation of silicon
- 7 February 2000
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 76 (6), 783-785
- https://doi.org/10.1063/1.125894
Abstract
The craters resulting from high-irradiance single-pulse laser ablation of single-crystal silicon show a dramatic increase in volume at a threshold irradiance of Time-resolved shadowgraph images show ejection of large particulates from the sample above this threshold irradiance, with a time delay ∼300 ns. A numerical model was used to estimate the thickness of a superheated layer near the critical state. Considering the transformation of liquid metal into liquid dielectric near the critical state (i.e., induced transparency), the calculated thickness of the superheated layer at a delay time of 200–300 ns agreed with the measured crater depths. This agreement suggests that induced transparency promotes the formation of a deep superheated layer, and explosive boiling within this layer leads to particulate ejection from the sample.
Keywords
This publication has 11 references indexed in Scilit:
- Excimer laser ablation of thin gold films on a quartz crystal microbalance at various argon background pressuresApplied Physics A, 1997
- Invited paper Observation of plasma shielding by measuring transmitted and reflected laser pulse temporal profilesApplied Physics A, 1996
- Gas dynamics and radiation heat transfer in the vapor plume produced by pulsed laser irradiation of aluminumJournal of Applied Physics, 1996
- Comments on explosive mechanisms of laser sputteringApplied Surface Science, 1996
- Laser Ablation Mass Removal versus Incident Power Density during Solid Sampling for Inductively Coupled Plasma Atomic Emission SpectroscopyAnalytical Chemistry, 1995
- Critical assessment of thermal models for laser sputtering at high fluencesApplied Physics Letters, 1995
- Mechanisms of melt droplets and solid-particle ejection from a target surface by pulsed laser actionApplied Physics A, 1995
- Formation of YBaCuoxide thin films by pulsed laser deposition: A comparative study in the UV, visible and IR rangeThin Solid Films, 1990
- Nonresonant interaction of high-power optical radiation with a liquidSoviet Physics Uspekhi, 1980
- Calculated temperature distribution during laser annealing in silicon and cadmium tellurideApplied Physics A, 1979