Single etch grating couplers for mass fabrication with DUV lithography
- 24 February 2012
- journal article
- research article
- Published by Springer Science and Business Media LLC in Optical and Quantum Electronics
- Vol. 44 (12-13), 521-526
- https://doi.org/10.1007/s11082-012-9563-2
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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