A silicon condenser microphone with structured back plate and silicon nitride membrane
- 29 February 1992
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 30 (3), 251-258
- https://doi.org/10.1016/0924-4247(92)80128-p
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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