Growth ripples upon strained SiGe epitaxial layers on Si and misfit dislocation interactions

Publisher Website

1 July 1994

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology A

Vol. 12 (4), 1924-1931
https://doi.org/10.1116/1.578984

Abstract

No abstract available

Keywords

DISLOCATIONS

Cited by 79 articles