A high-speed low-voltage stress-induced micromachined 2 x 2 optical switch
- 1 November 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 11 (11), 1396-1398
- https://doi.org/10.1109/68.803057
Abstract
A low-voltage electrostatically actuated 2/spl times/2 fiber optic switch is achieved using a stress-induced curved polysilicon actuator. The curved polysilicon beam substantially lowers the electrostatic operating voltage of the switch. Large mirror displacement (300 /spl mu/m) and low operating voltage (20 V) are obtained simultaneously. Sub-millisecond switching time (<600 /spl mu/s), low optical insertion loss (0.7 dB), and small polarization-dependent loss (0.09 dB) have been achieved.Keywords
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