Three‐dimensional optical laser lithography beyond the diffraction limit
Top Cited Papers
Open Access
- 19 March 2012
- journal article
- Published by Wiley in Laser & Photonics Reviews
- Vol. 7 (1), 22-44
- https://doi.org/10.1002/lpor.201100046
Abstract
No abstract availableKeywords
Funding Information
- Deutsche Forschungsgemeinschaft
- State of Baden-Württemberg
- Karlsruhe Institute of Technology
- Bundesministerium für Bildung und Forschung
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