Energy enhancement and chaos control in microelectromechanical systems
- 12 February 2008
- journal article
- Published by American Physical Society (APS) in Physical Review E
- Vol. 77 (2), 026210
- https://doi.org/10.1103/physreve.77.026210
Abstract
For a resonator in an electrostatic microelectromechanical system (MEMS), nonlinear coupling between applied electrostatic force and the mechanical motion of the resonator can lead to chaotic oscillations. Better performance of the device can be achieved when the oscillations are periodic with large amplitude. We investigate the nonlinear dynamics of a system of deformable doubly clamped beam, which is the core in many MEMS resonators, and propose a control strategy to convert chaos into periodic motions with enhanced output energy. Our study suggests that chaos control can lead to energy enhancement and consequently high performance of MEM devices.Keywords
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