Fabrication of nano-sized resist patterns on flexible plastic film using thermal curing nano-imprint lithography
- 28 February 2006
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 83 (2), 323-327
- https://doi.org/10.1016/j.mee.2005.09.006
Abstract
No abstract availableKeywords
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